Open to all researchers at the university and accessible for external organisations as well, our cleanroom enables wafer-scale micro and nano fabrication. It comprises several class-1000-rated rooms and houses process tools for lithography, dry etch, deposition, chemical processing, post processing and characterisation. These tools are used for rapid prototyping of a range of devices, including photonic structures, microfluidics, micro-lenses, integrated circuits and MEMS. Equipment and specifications listed below.

Linear grating

Microlens profilometry


Dry etch


Chemical processing

Post processing


Cleanroom requests

To enquire about using the cleanroom, please email Cleanroom Manager Dr Andrew Murray or call him via +44 (0)117 455 7741.

Proposal Form

Project Proposal Form (Office document, 31kB) and submit this to the Cleanroom staff.


Dr Andrew Murray
Cleanroom Manager
0117 455 7741

Dr Pisu Jiang
Senior Cleanroom Process Engineer
0117 455 4243

Virtual tour

Explore our facilities and equipment with our Cleanroom virtual tour

Health and safety

Read our Cleanroom user guide (PDF, 95kB) about how to safely use the cleanroom and its facilities.‌


University of Bristol Cleanroom (Room 1.41),
HH Wills Physics Laboratory,
University of Bristol,
Tyndall Avenue,
BS8 1TL.
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