Cleanroom

Open to all researchers at the university and accessible for external organisations as well, our cleanroom enables wafer-scale micro and nano fabrication. It comprises several class-1000-rated rooms and houses process tools for lithography, dry etch, deposition, chemical processing, post processing and characterisation. These tools are used for rapid prototyping of a range of devices, including photonic structures, microfluidics, micro-lenses, integrated circuits and MEMS. Equipment and specifications listed below.

Linear grating

Lithography

Dry etch

Deposition

Chemical processing

Post processing

Characterisation

Cleanroom requests

To enquire about using the cleanroom email Cleanroom Manager Dr Andrew Murray or call 0117 95 46932 and download our project proposal form

Enquiries


Dr Andrew Murray
Cleanroom Manager
w.a.murray@bristol.ac.uk
0117 95 46932
Dr Graham Marshall
Academic Liaison 
Graham.Marshall@bristol.ac.uk
0117 92 88718
Dr Pisu Jiang
Senior Process Engineer
P.Jiang@bristol.ac.uk

Virtual tour

Explore our facilities and equipment with our Cleanroom virtual tour

Get support

Get advice on your process requirements from our experienced engineers

Health and safety

Read our user guide about how to safely use our cleanroom Cleanroom user guide (PDF, 95kB)

Address

University of Bristol Cleanroom, School of Physics, University of Bristol, Tyndall Avenue, Bristol, BS8 1TL, UK
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