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Publication - Professor Siyuan Yu

    High Quality Factor Deuterated Silicon Nitride (SiN

    D) Microring Resonators

    Citation

    Wu, Z, Shao, Z, Xu, Z, Zhang, Y, Liu, L, Yang, C, Chen, Y & Yu, S, 2019, ‘High Quality Factor Deuterated Silicon Nitride (SiN: D) Microring Resonators’. in: 2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018: 2018, 29 July–3 August, Hong Kong, China. Optical Society of America (OSA)

    Abstract


    We demonstrate low-loss deuterated SiN microring resonators fabricated by low-temperature plasma-deposition technique with a high intrinsic quality factor of up to 1.2× 10
    6
    at 1547.6 nm, and >0.8×10
    6
    throughout 1500-1600 nm.

    Full details in the University publications repository