Skip to main content

Unit information: Nanofabrication for Quantum Engineering in 2021/22

Unit name Nanofabrication for Quantum Engineering
Unit code EENGM0026
Credit points 10
Level of study M/7
Teaching block(s) Teaching Block 4 (weeks 1-24)
Unit director Dr. Jon Pugh
Open unit status Not open



Quantum Systems Engineering

School/department Department of Electrical & Electronic Engineering
Faculty Faculty of Engineering

Description including Unit Aims

The unit will provide theoretical and practical training to lay the foundations for nanofabrication, especially as it applies to photonic quantum information processing. Nanofabrication techniques and metrology tools will be covered in the lectures. A lithographic design tool (CAD) will be exploited to design lithographic masks. Practical sessions, comprising lithography, etching and microscopy tools, will provide students with extensive hands-on training.

Aim: To provide an overview of nano-engineering capabilities and challenges. To enable students to map a fabrication flow given a device idea. Understand system limitations, what can and cannot be made

Intended Learning Outcomes

Upon completion of this unit, students should:

  • Experience of a range of nano fabrication and characterisation techniques
  • Be able to develop a workflow for the cleanroom process
  • Be able to plan their resources for a given nanofabrication process
  • Be able to identify what metrology tools will be required
  • Familiarity with designing lithography masks -
  • Appreciation of CMOS fabrication

Teaching Information

Teaching will be delivered through a combination of synchronous and asynchronous sessions, including lectures, practical activities supported by drop-in sessions, problem sheets and self-directed exercises.

Assessment Information

3000 word report on the mini project, weighted at 100%


If this unit has a Resource List, you will normally find a link to it in the Blackboard area for the unit. Sometimes there will be a separate link for each weekly topic.

If you are unable to access a list through Blackboard, you can also find it via the Resource Lists homepage. Search for the list by the unit name or code (e.g. EENGM0026).

How much time the unit requires
Each credit equates to 10 hours of total student input. For example a 20 credit unit will take you 200 hours of study to complete. Your total learning time is made up of contact time, directed learning tasks, independent learning and assessment activity.

See the Faculty workload statement relating to this unit for more information.

The Board of Examiners will consider all cases where students have failed or not completed the assessments required for credit. The Board considers each student's outcomes across all the units which contribute to each year's programme of study. If you have self-certificated your absence from an assessment, you will normally be required to complete it the next time it runs (this is usually in the next assessment period).
The Board of Examiners will take into account any extenuating circumstances and operates within the Regulations and Code of Practice for Taught Programmes.